Silicon epilayer thickness

Silicon epilayer thickness

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Thickness determination for epilayers on silicon wafers

Configuration file
../demo/scout/epi_layer_analysis/epi_layer_analysis.sc2

Main window

What do you see?
This configuration determines the thickness of a silicon epilayer (undoped) on a doped substrate of known and fixed doping level. The SCOUT simulation is shown in blue, measured data are displayed in red. The result is displayed (in microns) in the upper right corner of the main window.

What can you do?
You, as an unexperienced user, can import spectra, do the analysis and write the results to a data table.

Here are your actions:

·	Press the Import button and select a file from the folder ../demo/scout/epi_layer_analysis/. As shown in the dialog below choose the SpectraCalc (GRAMS) format. Do not worry about the German text fragments: Your dialog will be in your language.

·	After new spectrum has been loaded another dialog called 'Spectral range' opens and shows the spectral range of the experimental data. Leave this dialog with OK.

·	Now start the analysis pressing Start. The Start button turns into red and becomes a Stop button.

·	After a short while the automatic fit is done and the Stop button turns into a Start button again. The obtained thickness value is displayed.

·	Press Export and answer 'Yes' to the question 'Erase the worksheet?'.

·	Repeat the Import, Start, Export sequence for all 4 demo spectra.

·	Now press Workbook to open the table with results. Row 7 contains the processed filenames, row 9 the obtained thickness values.