| Overview |
| About this document |
| About Tutorial 1 |
| Example 1: Carrier concentration from IR reflectance |
| The problem |
| Background |
| SCOUT work |
| Overview |
| Step 1: Define optical constants |
| Step 2: Define the layer stack |
| Step 3: Define the simulated spectra |
| Step 4: Fitting parameters |
| Results |
| Example 2: Epilayer thickness from IR reflectance |
| The problem |
| Background |
| SCOUT work |
| Step 1: Making use of previous work |
| Step 2: Extensions |
| Step 3: Parameter adjustment |
| Exercise |
| Example 3: Silver layer on glass, thickness determination |
| The problem |
| SCOUT work |
| Step 1: Importing optical constants from the database |
| Step 2: Definition of the layer stack |
| Step 3: Reflectance spectrum and comparison to measured data |
| Sputtering rate |
| Example 4: Remote control by OLE automation |
| The task |
| The table |
| The macros |
| A sample session |
© 2007 Wolfgang Theiss