SCOUT tutorial 1

- 3 -

3D chart

- A -

About

Ag

angle

angle of incidence

	Step 3: Define the simulated spectra
	Step 3: Reflectance spectrum and comparison to measured data

angles of incidence

angular dependence

automatic fit

	Step 4: Fitting parameters
	Step 3: Reflectance spectrum and comparison to measured data

Autoscale

average

- B -

background susceptibility

backside

	Step 2: Define the layer stack
	The problem

- C -

carrier concentration

	Background
	Results

charge

charge carriers

	The problem
	Background
	Step 1: Define optical constants

chemical symbols

coherent

concentration

	The problem
	Background

conductivity

configuration

	Step 1: Define optical constants
	Step 1: Making use of previous work

configuration file

constant

- D -

damping constant

	Background
	Step 4: Fitting parameters
	Step 3: Parameter adjustment

data points

database

	The problem
	Step 1: Importing optical constants from the database

database grid

database window

deposition rate

depth profile

deviation

dielectric background

dielectric function

	The problem
	Step 2: Extensions
	Step 1: Importing optical constants from the database

dielectric function list

Dielectric function model

dielectric function parameters

divergence

Doped silicon

doping

doping level

	The problem
	Background

drag

	Step 4: Fitting parameters
	Step 2: Extensions
	Step 1: Importing optical constants from the database

drag&drop

Drude model

	The problem
	Background
	Step 2: Extensions

Drude susceptibility

- E -

effective mass

electron

electronic devices

epilayer

	The problem
	Background

epilayer thickness

Excel 97

	The task
	The table

experimental data

	Step 3: Define the simulated spectra
	Step 4: Fitting parameters

- F -

file format

	Step 3: Define the simulated spectra
	Step 1: Making use of previous work

fit

fit parameter

fit parameters

Fitting parameters

free charge carriers

	The problem
	Step 1: Define optical constants

- G -

Glass

	The problem
	Step 1: Importing optical constants from the database

global range

Graphics

- H -

halfspace

Help&Manual

hypertext jumps

- I -

Import

	Step 3: Define the simulated spectra
	Step 3: Reflectance spectrum and comparison to measured data

impurity

incoherent

infared analysis

infrared

interface

	Step 2: Define the layer stack
	Background
	Step 3: Reflectance spectrum and comparison to measured data

interference

interference envelope

interference fringes

interference pattern

interference patterns

interpolation

IR

- L -

layer

layer parameters

layer stack

	Step 2: Define the layer stack
	Step 2: Extensions
	Step 2: Definition of the layer stack

layer structure

layer thickness

list of dielectric functions

	Step 2: Extensions
	Step 1: Importing optical constants from the database
	Step 2: Definition of the layer stack

list of fit parameters

	Step 4: Fitting parameters
	Step 3: Parameter adjustment

list of optical constants

list of simulated spectra

List properties

literature data

- M -

main window

Manual fitting

mass

measured spectrum

menu

microns

microscope slide

mobility

	The problem
	Background

mouse button

	Step 2: Define the layer stack
	Step 1: Importing optical constants from the database

multiphonon

- O -

OLE automation

optical constants

	Step 1: Define optical constants
	The problem
	Step 1: Importing optical constants from the database

optical contrast

optimization

	Step 4: Fitting parameters
	Step 3: Parameter adjustment

Overview

- P -

Parameter adjustment

parameter optimization

parameters of the computed spectra

partial waves

p-doped silicon

phase shift

plasma frequency

	Background
	Step 4: Fitting parameters
	Step 3: Parameter adjustment

polarization

program configuration

- R -

Range

	Step 1: Define optical constants
	Step 3: Define the simulated spectra
	Step 3: Reflectance spectrum and comparison to measured data

Range command

Recalc

recomputation

reflectance

	Step 3: Define the simulated spectra
	Background
	The problem
	Step 3: Reflectance spectrum and comparison to measured data

Report

resistivity

	The problem
	Background
	Results

resolution

rough backside

- S -

sample spot

sample structure

SCOUT configuration

semiconductor

	The problem
	Background

semiconductors

silicon

	Background
	Step 1: Define optical constants

silver

	The problem
	Step 1: Importing optical constants from the database

simple layer

	Step 2: Extensions
	Step 2: Definition of the layer stack

simulated spectra

slider

sliders

spectra

SpectraCalc format

spectral range

	Step 1: Define optical constants
	Step 3: Define the simulated spectra

spectrum list

spectrum type

sputtering

Sputtering rate

	The problem
	Sputtering rate

superposition

	Background
	Step 3: Reflectance spectrum and comparison to measured data

susceptibilities

susceptibility

susceptibility list

	Step 1: Define optical constants
	Step 2: Extensions

- T -

table

tables

technical manual

thickness

	The problem
	Background
	The problem
	Step 2: Definition of the layer stack

thickness variation

thickness vs. time relation

- U -

unit

Update

- V -

Vacuum

Visual fitting

VisualBasic

- W -

wafer backside