DD1 is a small sputtering device that can deposit thin films on small substrates such as microscope slides. Looking at the geometry of the machine, we do not expect the films to be very homogeneous. But we can do a lot of rather cheap deposition experiments with the following materials:
Metals
·
Au
·
Ag
·
Cr
Oxides
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A-oxide
·
B-oxide
·
C-oxide
Nitrides
·
Si3N4
DD1 has a rotating wheel with 20 positions for microscope slides. Each sample can be placed over various sputtering targets. A system of programmable shutters enables us to vary the deposition time for each target and each individual sample.